Microelectronic Device Technology

Microelectronic Device Technology

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BEST COMBINATION OF Al AND Cu INTERCONNECTS In order to select the interconnect system, we have studied two cases for the Al and Cu wiring structure shown in Fig.4; one case is metal thickness constant and the other is resistanceanbsp;...


Title:Microelectronic Device Technology
Author:
Publisher:Society of Photo Optical - 1999
ISBN-13:

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