MEMS design, fabrication, characterization, and packaging
30 May-1 June 2001, Edinburgh, UK Uwe F. W. Behringer, Deepak Uttamchandani, Society of Photo-optical ... Schematic diagram of an oscillator SAW sensor with a SAW resonator The schematic diagram of IDT and reflectors in Fig. 2 showsanbsp;...
| Title | : | MEMS design, fabrication, characterization, and packaging |
| Author | : | Uwe F. W. Behringer, Deepak Uttamchandani, Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers |
| Publisher | : | Society of Photo Optical - 2001 |
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